Cleanroom Classification Table

Cleanroom Classification Table

For the different classification of the cleanroom, the ISO-14644 and Fed-Std-209E definition are the standards which all cleanrooms must conform to.

 

※ Cleanroom Classification Table

Cleanroom Standard Cleanroom Classification Guidelines
ISO 14644-1 Class 3 Class 4 Class 5 Class 6 Class 7 Class 8
Federal Standard 209E 1 10 100 1,000 10,000 100,000
Air Changes / Hour 360-540 300-540 240-480 150-240 60-90 5-48
 

※ Particles

ISO Classification Number Maximum concentration limits (particles/m3 of air) for particles equal to and larger than the considered sizes shown below
  ≥0.1µm ≥0.2µm ≥0.3µm ≥0.5µm ≥1µm ≥5.0µm
ISO Class 1 10 2 - - - -
ISO Class 2 100 24 10 4 - -
ISO Class 3 1,000 237 102 35 8 -
ISO Class 4 10,000 2,370 1,020 352 83 -
ISO Class 5 100,000 23,700 10,200 3,520 832 29
ISO Class 6 1,000,000 237,000 102,000 35,200 8,320 293
ISO Class 7 - - - 352,000 83,200 2,930
ISO Class 8 - - - 3,520,000 832,000 29,300
ISO Class 9 - - - 35,200,000 8,320,000 293,000
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